Murarka, Shyam P.
Copper-fundamental mechanisms for microelectronic applications / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann. - New York : John Wiley, cop. 2000
. - XXVIII, 337 p. ; 24 cm
0-471-25256-5
Materiais Semiconductores / Cobre / Metalização /
621.38-1/MUR/COP
Copper-fundamental mechanisms for microelectronic applications / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann. - New York : John Wiley, cop. 2000
. - XXVIII, 337 p. ; 24 cm
0-471-25256-5
Materiais Semiconductores / Cobre / Metalização /
621.38-1/MUR/COP