Lyshevski, Sergey Edward
Nano-and microelectromechanical systems : fundamentals of nano-and microengineering / Sergey Edward Lyshevski. - Boca Raton : CRC Press, cop. 2001
. - XII, 338 p. : il. ; 24 cm. - (Nano-and Microscience, Engineering, Technology and Medicine Series)
0-8493-0916-6
Electromecânica / Microelectricomecânica / Microelectricomecânica Sistemas /
621.3-1/LYS/NAN
Nano-and microelectromechanical systems : fundamentals of nano-and microengineering / Sergey Edward Lyshevski. - Boca Raton : CRC Press, cop. 2001
. - XII, 338 p. : il. ; 24 cm. - (Nano-and Microscience, Engineering, Technology and Medicine Series)
0-8493-0916-6
Electromecânica / Microelectricomecânica / Microelectricomecânica Sistemas /
621.3-1/LYS/NAN